Diamond Processing and Nano-Patterning

The ability to make many diamond-based electronic and mechanical components relies on the ability to produce structures across a range of varied dimensions. Utilising the facilities of the JWNC such as electron beam lithography, dry etching and metal/dielectric deposition, our work has established processing techniques for the formation of diamond devices and structures with dimensions ranging from hundreds of microns down to tens of nanometres. This includes processing of single-crystal substrates and polycrystalline diamond films.

Diamond MEMS 1

Resonating diamond cantilevers

20 nm metallised dots on diamond patterned by electron-beam lithography

100 nm diameter pillars etched into nano-crystalline diamond

Etched NCD cantilever 1

Cantilever etched from nano-diamond on silicon.

Diamond “coin” produced as a promotional piece for the Diamond Jubilee 2012

Diamond “coin” produced as a promotional piece for the Diamond Jubilee 2012